12吋ETCH Quartz 消耗品

部門	機台	品名
12吋 ETCH	LAM	Quartz Edge Ring 300mm
	AMT	QTZ Single Ring
		Shadow Ring
		Cover Ring
		Insulator 300mm E MAX
	TEL	Ring Focus Inner
		Insulator Ring 360L QTZ
		Ring Shield Upper
		Cover Ring

部門	機台	品名
12吋 ETCH	E-MAX	INJECTOR GAS 12HOLES
		INJECTOR GAS 15HOLES
		INJECTOR GAS
		INSULATOR 300 MM E MAX
		SHADOW RING STEPPED QTZ
		SHADOW RING
	HART	SINGLE RING SMALL DIA QTZ
		INSULATOR RING ,HART
	HART PLUS	QTZ RING
	HITACHI	FRONT RING
	KEM	QUARTZ CHAMBER
	DPS	SINGLE RING QTZ

	Quartz Parts