客戶服務
 
 

   

 
Cleaning Engineering
   

半導體光電產業設備機台用之零組件 ---

O-RingQuartzCeramicAnodizedMetal …等材質洗淨工程.
一般洗淨:化洗除膜振盪烘乾包裝運送處理.
除 膜:乾式噴砂酸洗處理 鹼洗處理乾式噴洗(CO2 Blasting) .
清 洗:超音波振盪純水洗淨超純水振盪.
表面處理:表面粗糙度平坦度, 拋光 研磨處理.

特殊表面加工:鋁陶瓷熔射(Y2O3、Al2O3 Thermal Spray).陽極膜去除,再生處理 (Hard Anodize Coating) .

 

       
 
 
Cleaning Ability
   

Semi-conductor Industrial:300mm Parts Kits, 90 / 65 Nano process
mass production.

Etch tool parts kits
Thin Film tool parts kits
Photo tool parts kits

 
Optical-Electrical Industrial :LCD、CF、OLED G5 Parts Kits, G6 planning.

CVD tool parts kits:Diffuser, Backing Plate
PVD tool parts kits:Masker
Etch tool parts kits:Upper/Lower Electrode, Shield
Sputter tool parts kits:ULVAC & AFC Parts Kits


 

 
 
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