Quartz Parts

Quartz Parts (Natural Quartz & Synthetic Quartz):
•Shadow Ring	•Focus Ring
•Quartz G.D.P.	•Confinement Ring
•Disk Plate	•Diffuser Plate
•Cover Ring	•End Point Window
•Monometer Quartz	•Top Plate
•Insulation Pipe	•Lamp Plate
•Sub Chamber	•Main Chamber
•Quartz Plate	•Shower Plate
•Quartz Sleeve	•Insulator Ring

IC(6”,8”,12”) :
CVD:	‧ AMAT DXZ, HDP, TXZ, PRODUCER
	‧ NOVELLUS
	‧ CANON  4800, 5800, 6000
ETCH:	‧ TEL  SCCM, DRM
	‧ LAM 94, 95, 96
	‧ Mattson
	‧ AMAT DPS, MXP+, Super-E, E-MAX, HART+
W-ETCH:	‧TANK, CHUCK, GUIDE
	‧SES(SUGAI), TEL, SCREEN
LCD:
	‧ AKT 1600,  4300, 5500..et
	‧TEL RIE, ICP, PE700, HT800,HT900…etc
	‧ YAC, ULVAC, etc

                     

	12吋ETCH Quartz消耗品