12吋 ETCH Y2O3 Coating

部門	品名
12吋ETCH	GDP 111R HOLE
	CHAMBER LINER SINGLE PORT(黑色)
	4+4+1 DGDP
	SLIT LINER DOOR(白金色,黑色)
	CHAMBER LINER(墨綠色)
	CATHODE LINER
	RING COVER WALL EX ; Y2O3
	PLATE EXHAUST ;Y2O3(陽極化)
	SHIELD DEPO ;Y2O3
	BDLLDETM ;Y2O3
	SHUTTER OX Y THERMAL SPRAYING ;Y2O3

	Y2O3 Coating